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ArrowASC Facilities & Capabilities

Dual Beam Focused Ion Beam/Field Emission Scanning Electron Microscope.
Dual Beam Focused Ion Beam/Field Emission Scanning Electron Microscope.

Dual Beam Focused Ion Beam Device

The Zeiss 1540EsB is a state-of-the-art dual beam (electron and Ga ion) field emission Scanning Electron Microscope (SEM) with a spatial resolution of better than 1 nanometer. This multifunctional tool has many advanced features:

  • FIB: The low-energy capable Focused Ion Beam (FIB) column, allows for live-imaging of samples at high magnification (both microscopes have 1 nm resolution) while simultaneously machining with 5 nanometer precision using a stream of Ga ions.
  • EsB: Low voltage in-lens backscattered electron imaging (also in-lens secondary electron imaging).
  • GIS: A gas injection system makes it possible to deposit material for protective coatings and contacts as well as to modify etch rates and is an essential tool for the automated preparation of transmission electron microscope specimens.
  • OIM: High resolution crystallographic orientation imaging (high speed Hikari camera).
  • EDS: Fast chemical mapping (EDAX Apollo X SDD detector with <127 eV resolution). NPGS: Electron lithography (Nabity Nanopattern Generating System) and
  • FIB patterning. Nanoprobe: An Omniprobe Autoprobe (model 200.2) provides precise sample extraction and manipulation as well as force feedback.

A more detailed description of the capabilities of this system can be
found here.

To use this instrument contact Bob Goddard.

Electromagnetic Test Capability

  • 14-16T and 15-17 T Oxford Instruments magnets with Variable Temperature operation from 2 to 120 K
  • 5.5 T Quantum Design SQUID magnetometer
  • Oxford Instruments 14 T Vibrating Sample Magnetometer with Cantilever Torque magnetometer.
  • Quantum Design 9 T Physical Property Measurement System with the following options: AC Susceptibility and DC Magnetization, Resistivity, Heat Capacity, Torque Magnetometer, Multi-Function Probe and Horizontal Rotator.
  • Quantum Design 16 T Physical Property Measurement System with the following options: VSM, Resistivity, Heat Capacity, Torque Magnetometer, Multi-Function Probe and Horizontal Rotator.
  • Very-Low-Field Shielded Test Facility
  • Extensive High-Sensitivity Electronics permitting nanovolt DC measurements

Fabrication and Heat-Treatment Laboratory Capability

Thin-Film Deposition and Bulk Chemistry Lab
Includes laser ablation, ion beam and magnetron sputtering and clean room patterning facilities.

Mechanical Processing Lab
Includes Cold (CIP) and hot (HIP) isostatic presses, a hydrostatic extrusion press, billet welding and sealing, swaging, wire drawing and heat treatment facilities providing a complete in-house strand fabrication facility.

Laser Confocal

Magneto-Optic Imaging Facility


Microstructural Evaluation Capability




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